Comparison of Copper and Cobalt Surface Reactivity for ...
09/07/2021 · The constant shrinking of critical dimensions in logic manufacturing is driving a change in integration of interconnects. While copper has been the material of choice for the past few decades, it is currently facing a serious challenge from other materials like cobalt. The focus of this paper is threefold. First, we compare the reactivity of both materials in different media. Next, we confirm ...